Peculiarities of Microwave Lamb Wave Excitation in Composite SAW Resonator Based on Diamond Substrate | Научно-инновационный портал СФУ

Peculiarities of Microwave Lamb Wave Excitation in Composite SAW Resonator Based on Diamond Substrate

Тип публикации: доклад, тезисы доклада, статья из сборника материалов конференций

Конференция: 2020 Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, IFCS-ISAF 2020

Год издания: 2020

Идентификатор DOI: 10.1109/IFCS-ISAF41089.2020.9234948

Ключевые слова: aluminum nitride (aln), lamb wave, piezoelectric layered structure, saw resonator, single crystalline diamond

Аннотация: We study in detail both experimentally and theoretically Lamb-like wave excitation up to 7.3 GHz in the piezoelectric layered structures 'Me-IDT/AlN/(100) diamond' (\text{Me} =\text{Pt}, Al) configured as a SAW resonator. Theoretical investigation identifying Lamb wave types by Finite Element Modeling as well as by direct solution of the characteristic equations has been fulfilled. Resonance curves for Lamb-like waves have a higher quality factor Q compared to surface acoustic waves propagating on the same substrates. We observed experimentally an unusual effect of a significant increasing in Q-factor of Lamb wave resonance curves with frequency, from a value of 760 at 1.5 GHz to 3,400 at ∼7 GHz. It was shown that the peculiarities of Lamb wave excitation were closely connected with IDT diffraction effects. © 2020 IEEE.

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Издание

Журнал: IFCS-ISAF 2020 - Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, Proceedings

Номера страниц: 9234948

Издатель: Institute of Electrical and Electronics Engineers Inc.

Авторы

  • Kvashnin G. (Technological Institute for Superhard and Novel Carbon Materials (TISNCM), Moscow, Troitsk, Russian Federation)
  • Sorokin B. (Technological Institute for Superhard and Novel Carbon Materials (TISNCM), Moscow, Troitsk, Russian Federation)
  • Burkov S. (Siberian Federal University, Krasnoyarsk, Russian Federation)

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