Тип публикации: статья из журнала
Год издания: 2016
Идентификатор DOI: 10.1134/S106378421610008X
Аннотация: Technologies and methods of prototyping microfluidic devices are widely used in solving many biological problems and testing of operability of new microanalytic systems. This study is devoted to analyzing the features of the formation of microstructures in SU-8 photoresist and the preparation of replicas in polydimethyl siloxane by the soft lithography method. It has been shown that the aspect ratio of the resultant microstructures is determined by their shape, size, and the force of resist adhesion to the silicon substrate and the efficiency of the circulation of the developer around microstructures. In the replication of complex microstructures, an aspect ratio of similar to 25 is attained. The technology considered here is used to prepare microfluidic chips with mechanical traps for fixation and the in vitro analysis of living cells.
Издание
Журнал: TECHNICAL PHYSICS
Выпуск журнала: Vol. 61, Is. 10
Номера страниц: 1566-1571
ISSN журнала: 10637842
Место издания: NEW YORK
Издатель: MAIK NAUKA/INTERPERIODICA/SPRINGER
Персоны
- Bukatin A.S. (Institute for Analytical Instrumentation,Russian Academy of Sciences)
- Mukhin I.S. (St. Petersburg National Research University of Information Technologies,Mechanics,and Optics (ITMO University))
- Malyshev E.I. (St. Petersburg National Research Academic University,Russian Academy of Sciences)
- Evstrapov A.A. (St. Petersburg National Research University of Information Technologies,Mechanics,and Optics (ITMO University))
- Dubina M.V. (St. Petersburg National Research Academic University,Russian Academy of Sciences)
- Kukhtevich I.V. (St. Petersburg National Research University of Information Technologies,Mechanics,and Optics (ITMO University))
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