Biosensors based on nanowire field effect transistors with Schottky contacts

Тип публикации: доклад, тезисы доклада, статья из сборника материалов конференций

Конференция: 6th International School and Conference on Optoelectronics, Photonics, Engineering and Nanostructures, SPbOPEN 2019

Год издания: 2019

Идентификатор DOI: 10.1088/1742-6596/1410/1/012013

Аннотация: A top-down nanofabrication approach was used to obtain silicon nanowires from silicon-on-insulator wafers using direct-write electron beam lithography and plasma-reactive ion etching. Fabricated with designed pattern silicon nanowires are 0.4, 0.8, 2 μm in width and 100 nm in height. The devices can be applied in future medical diagnostic applications as novel biosensors with detection principle based on the changes in electrical characteristics of the silicon nanowires functionalized with thiol-containing molecules. © Published under licence by IOP Publishing Ltd.

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Издание

Журнал: Journal of Physics: Conference Series

Выпуск журнала: Vol. 1410, Is. 1

Номера страниц: 12013

ISSN журнала: 17426588

Издатель: Institute of Physics Publishing

Авторы

  • Smolyarova T.E. (Krasnoyarsk Science Center SB RAS, Krasnoyarsk, 660036, Russian Federation, Siberian Federal University, Krasnoyarsk660041, Russian Federation)
  • Lukyanenko A.V. (Kirensky Institute of Physics, Krasnoyarsk660036, Russian Federation, Siberian Federal University, Krasnoyarsk660041, Russian Federation)
  • Tarasov A.S. (Kirensky Institute of Physics, Krasnoyarsk660036, Russian Federation, Siberian Federal University, Krasnoyarsk660041, Russian Federation)
  • Shanidze L.V. (Krasnoyarsk Science Center SB RAS, Krasnoyarsk, 660036, Russian Federation, Siberian Federal University, Krasnoyarsk660041, Russian Federation)
  • Baron F.A. (Kirensky Institute of Physics, Krasnoyarsk660036, Russian Federation)
  • Zelenov F.V. (Kirensky Institute of Physics, Krasnoyarsk660036, Russian Federation)
  • Yakovlev I.A. (Kirensky Institute of Physics, Krasnoyarsk660036, Russian Federation)
  • Volkov N.V. (Krasnoyarsk Science Center SB RAS, Krasnoyarsk, 660036, Russian Federation)

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